Thermo-catalytic deposition of silicon nitride - a new method for excellent silicon surface passivation
Bibliographic record
Abstract
The deposition of silicon nitride (SiN) films for the surface passivation of crystalline silicon solar cells by thermo-catalytic chemical vapor deposition (cat-CVD), also known as hot-wire CVD, was investigated. A detailed study was performed to assess the useful parameter range. We found that with this new technique very high gas yield and deposition rate can be reached using a very simple deposition source. Excellent surface passivation of p-type silicon could be achieved for the first time using SiN films deposited by cat-CVD. A very strong correlation of the film composition and surface recombination with the gas flow ratio was observed. The films have been applied to the front and back of solar cells to demonstrate their effectiveness. A detailed comparison between cat-CVD and high-quality plasma-deposited films has been performed, in which the films prove very similar.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".