Bibliographic record
Abstract
Microsensors fabrication based on a standard CMOS process represents a very attractive alternative for low cost high reliable transducers that include the conditioning along with the detection component. This paper report on the implementation of a relative humidity (RH) microsensor built in Mitel15 technology. The sensitivity mechanism is based on the resistance variation of a polyaniline layer spun over the conveniently built electrodes of the transducer when RH of the environment changes. Although less convenient that the capacitive RH microsensors, resistive based microsensors in the present configuration present two major benefits. They require simple one step low cost postprocessing to accomplish the sensor and the transducer as built is not affected by the swelling of the polymer due to water absorption at high RH. Besides, the conditioning circuitry is very simple and robust, and requires low power consumption. The performances of the active material and of the transducer are reported The clearly indicate that RH micromachined sensors based on resistive sensitive mechanisms are feasible in Mitel15 technology. One single low cost postprocessing performed after the completion of the process enables the fabrication of such sensors.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.003 | 0.002 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".