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Record W2147651905 · doi:10.1109/ccece.1999.804965

Humidity microsensor in CMOS Mitel15 technology

2003· article· en· W2147651905 on OpenAlexafffund
Ion Stiharu, Shaloo Rakheja, L. Wang

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldChemical Engineering
TopicAnalytical Chemistry and Sensors
Canadian institutionsConcordia University
FundersNatural Sciences and Engineering Research Council of CanadaConcordia University
KeywordsResistive touchscreenTransducerCapacitive sensingFabricationCMOSMaterials scienceSensitivity (control systems)Signal conditioningElectronic engineeringSurface micromachiningRelative humidityElectrical engineeringOptoelectronicsComputer sciencePower (physics)Engineering

Abstract

fetched live from OpenAlex

Microsensors fabrication based on a standard CMOS process represents a very attractive alternative for low cost high reliable transducers that include the conditioning along with the detection component. This paper report on the implementation of a relative humidity (RH) microsensor built in Mitel15 technology. The sensitivity mechanism is based on the resistance variation of a polyaniline layer spun over the conveniently built electrodes of the transducer when RH of the environment changes. Although less convenient that the capacitive RH microsensors, resistive based microsensors in the present configuration present two major benefits. They require simple one step low cost postprocessing to accomplish the sensor and the transducer as built is not affected by the swelling of the polymer due to water absorption at high RH. Besides, the conditioning circuitry is very simple and robust, and requires low power consumption. The performances of the active material and of the transducer are reported The clearly indicate that RH micromachined sensors based on resistive sensitive mechanisms are feasible in Mitel15 technology. One single low cost postprocessing performed after the completion of the process enables the fabrication of such sensors.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.003
Threshold uncertainty score0.012

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0010.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0030.002

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.010
GPT teacher head0.228
Teacher spread0.217 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations1
Published2003
Admission routes2
Has abstractyes

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