A low-noise parasitic-insensitive switched-capacitor CMOS interface circuit for MEMS capacitive sensors
Bibliographic record
Abstract
This paper describes a differential low-noise high-resolution parasitic-insensitive switched-capacitor readout circuit that is intended for capacitive sensors, in particular, for MEMS inertial sensory systems. The operation of the proposed readout front-end circuit is explained. Amplitude modulation/demodulation and correlated double sampling techniques are used in the interface circuit to minimize the undesirable effects of the amplifier offset and flicker (1/f) noise. The application of the aforementioned techniques also further improve the sensitivity of the readout circuit. The interface system is designed and laid out in a 0.8 μm CMOS process. Post-layout simulation results demonstrate that the circuit is capable of resolving input sense capacitance variations as low as 0.5 aF with a sensitivity of 9.98 mV/aF. The circuit consumes 8.38 mW from a single 5 V supply.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.002 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.003 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".