A low-noise parasitic-insensitive switched-capacitor CMOS interface circuit for MEMS capacitive sensors
Bibliographic record
Abstract
This paper describes a differential low-noise high-resolution parasitic-insensitive switched-capacitor readout circuit that is intended for capacitive sensors, in particular, for MEMS inertial sensory systems. The operation of the proposed readout front-end circuit is explained. Amplitude modulation/demodulation and correlated double sampling techniques are used in the interface circuit to minimize the undesirable effects of the amplifier offset and flicker (1/f) noise. The application of the aforementioned techniques also further improve the sensitivity of the readout circuit. The interface system is designed and laid out in a 0.8 μm CMOS process. Post-layout simulation results demonstrate that the circuit is capable of resolving input sense capacitance variations as low as 0.5 aF with a sensitivity of 9.98 mV/aF. The circuit consumes 8.38 mW from a single 5 V supply.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".