Smoothing dry-etched microstructure sidewalls using focused ion beam milling for optical applications
Bibliographic record
Abstract
This paper presents a new sidewall smoothing process for Si micro-optical components using focused ion beam (FIB) milling. First, the deep reactive ion etching (DRIE) Bosch process is employed to form a microstructure on a Si substrate. However, scalloping which is induced on the sidewall by the repetition of etching and passivation steps is a major source of light scattering, reducing surface reflectivity in optical applications. In this research, FIB is used to smooth the rough sidewall surface and obtain polished mirror surface. After the DRIE Bosch process, the values of sidewall roughness as measured by atomic force microscopy were 153.0 ± 13.5 nm with an rms value of 28.1 ± 6.4 nm. The FIB smoothing process tremendously improved the surface roughness of etched sidewalls resulting in a maximum peak-to-valley roughness and an rms roughness of 5.7 ± 1.8 nm and 1.6 ± 0.7 nm, respectively. In this paper, the DRIE Bosch process and the FIB smoothing process are described in detail and applications using this technique are discussed.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".