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Record W2152697838 · doi:10.1109/acc.2006.1656386

Robust control of an electrostatically actuated MEMS in the presence of parasitics and parametric uncertainties

2006· article· en· W2152697838 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldEngineering
TopicControl and Stability of Dynamical Systems
Canadian institutionsPolytechnique Montréal
FundersPolytechnique Montréal
KeywordsParasitic extractionParametric statisticsActuatorMicroelectromechanical systemsControl theory (sociology)Stability (learning theory)BacksteppingRobust controlComputer scienceControl engineeringControl systemRobustness (evolution)EngineeringAdaptive controlElectronic engineeringControl (management)Materials scienceMathematics

Abstract

fetched live from OpenAlex

Due to the compact layout, manufacturing tolerance, modeling errors, and environmental changes, micro-electromechanical systems (MEMS) are subjected to parasitics and parameter variations. In order to better guarantee their stability and a certain level of performance, one must take into account these factors in the design of MEMS control systems. This work presents two robust control laws for a parallel-plate electrostatic micro-actuator in the presence of uncertainties. The dynamical model of the system is firstly established and two control schemes, both based on input-to-state stabilization (ISS) and robust backstepping, are proposed. The stability and performance of the system using these control schemes are demonstrated through both stability analysis and numerical simulation.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Simulation or modeling · Consensus signal: Simulation or modeling
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.048
Threshold uncertainty score0.232

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.007
GPT teacher head0.198
Teacher spread0.190 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it