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Record W2159071878 · doi:10.1109/essderc.2002.194930

Accurate Modelling of Thin-Film Resistor up to 40 GHz

2002· article· en· W2159071878 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldEngineering
Topic3D IC and TSV technologies
Canadian institutionsNanowave Technologies (Canada)McMaster University
Fundersnot available
KeywordsResistorCapacitanceResistive touchscreenMaterials scienceMicrostripElectrical engineeringOptoelectronicsCapacitorElectronic engineeringVoltageEngineeringPhysicsElectrode

Abstract

fetched live from OpenAlex

We present an accurate scalable model for thin-film resistor from DC up to 40GHz. The model is based on the microstrip theory, and an empirical self-capacitance parameter is introduced. The simulated S-parameters of the model show very good agreement with the measurements. Thin-film resistors (TFRs) are used in microwave circuits to implement components such as passive attenuators and terminal loads. To date, TFR model considers the parasitic series inductance and shunt capacitance to remain the same from the lossless microstrip case [1]. However, this model does not provide good results when the width of resistor is much smaller than substrate thickness. In this work, the self-capacitance is taken into account to make the model more accurate. The self-capacitance of planar resistor was first introduced by Demurie [2]. If a voltage is applied at the terminals of a resistor, a potential value will across two arbitrary points A and B in the resistor. Therefore, a parasitic capacitance exists between A and B. In MIC technology, a thin-film resistor is realized as a thin strip of lossy conductor on top of the dielectric substrate. The resistive layer is a self-passivating Tantalum Nitride (TaN) compound. The sheet resistivity of the process can be adjusted by controlling the thickness of the resistive layer. In most processes, a sheet resistivity of 50Ω per square is selected for the convenience it provides designers. A small area of conductor metal is deposited at the ends of the element as the contact to the resistors. The exposed resistive area defines the resistance of the structure. The fabrication design rules generally require that resistors are narrower than the width of the conductor contact by some minimum distance because of process alignment tolerances and the need to have a good contact with conductor layer at the end of resistor.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Simulation or modeling · Consensus signal: Simulation or modeling
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.637
Threshold uncertainty score0.276

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.051
GPT teacher head0.212
Teacher spread0.161 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Quick stats

Citations10
Published2002
Admission routes1
Has abstractyes

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