Micro-electro-discharge machining by MEMS actuators with planar electrodes microfabricated on the work surfaces
Why this work is in the frame
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Bibliographic record
Abstract
This paper reports a MEMS-based micro-electrodischarge machining technique that is enabled by the actuation of micromachined planar electrodes defined on the surfaces of the workpiece. The 18-μm-thick copper electrodes suspended with the anchors are formed on a stainless-steel wafer/workpiece. A DC voltage of 80–140 V is applied between the electrode and the workpiece through a resistance-capacitance circuit that controls the pulse energy and timing of spark discharges. The suspended electrode is electrostatically actuated towards the wafer, resulting in a breakdown, or spark discharge. This instantly lowers the gap voltage, releasing the electrode, and the capacitor is charged up through the resistor. Sequential pulses are produced through the self-regulated discharging-charging cycle. Micromachining of the stainless-steel wafer is demonstrated using an electrode with the area of 1.6×1.03 mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> , achieving removal depth of 20 μm with 100 V that provides the electrode’s displacement of ∼30 μm. The pulse formation is also implemented using only the parasitic/built-in capacitance between the electrode and the workpiece. A dynamic characteristic of the built-in capacitance is experimentally analyzed.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.001 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it