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Record W2160156004 · doi:10.1109/aps.2003.1219316

High-Q microstrip-fed bulk micromachined silicon cavities

2004· article· en· W2160156004 on OpenAlexaff
Micah Stickel, P.C. Kremer, George V. Eleftheriades

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldEngineering
TopicAdvanced MEMS and NEMS Technologies
Canadian institutionsUniversity of Toronto
Fundersnot available
KeywordsSurface micromachiningResonatorFabricationMaterials scienceWaferMicrostripQ factorSiliconOptoelectronicsWaveguideBulk micromachiningElectronic engineeringEngineering

Abstract

fetched live from OpenAlex

Bulk micromachining of silicon wafers to fabricate rectangular waveguide components has been the focus of much research over the past decade. Over that time, a number of different fabrication techniques have been presented. However, for resonator applications, these fabricated topologies restrict the cavity height to less than two wafer thicknesses. To allow for much deeper cavities, an enabling fabrication procedure for micromachined waveguide components has been proposed. In this paper, a regular height bulk silicon micromachined cavity of constant cross section, fed using a microstrip line, has been presented. The relatively low measured Q/sub 0/ factor for this cavity was due to the poor soldered connections between the top and bottom plates. A new enabling micromachined cavity design has also been introduced, which achieves a very high unloaded (Q/sub 0//spl cong/4500, measured) quality factor.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.012
Threshold uncertainty score0.566

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.005
GPT teacher head0.195
Teacher spread0.190 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations8
Published2004
Admission routes1
Has abstractyes

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