Electroless Ni Plating to Compensate for Bump Height Variation in Cu–Cu 3-D Packaging
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Bibliographic record
Abstract
The feasibility of electroless Ni plating to compensate the Cu bump height variation in Cu-Cu 3-D packaging was investigated. After fabricating Cu pillar bump and Cu micro-stud structure on the top and bottom chips, respectively, Cu-Cu thermocompression bonding and then electroless Ni plating were sequentially carried out and evaluated using dies shear force, daisy chain resistance, and microstructure. It is found that thermocompression bonding parameter optimization and Ar plasma surface cleaning increased the Cu-Cu bond strength. The electroless Ni plating can compensate for the bump height variation of 1.9 μm in a chip with filling the gap between the Cu-pillar bump and Cu-micro-stud structure. In addition, the electroless plated Ni reduced the daisy chain resistance with the increase of the contact area. The resistance of bump daisy chains after electroless Ni plating was measured to be about 15% lower than that obtained after Cu-Cu thermocompression bonding.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.001 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it