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Record W2162760352 · doi:10.1109/tmech.2010.2066283

Electrostatic Torsional Micromirror With Enhanced Tilting Angle Using Active Control Methods

2010· article· en· W2162760352 on OpenAlex
Yuan Ma, Shariful Islam, Ya‐Jun Pan

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueIEEE/ASME Transactions on Mechatronics · 2010
Typearticle
Languageen
FieldEngineering
TopicPhotonic and Optical Devices
Canadian institutionsDalhousie University
Fundersnot available
KeywordsMicroelectromechanical systemsMaterials scienceSilicon on insulatorNonlinear systemControllabilityFabricationOpticsComputer scienceOptoelectronicsControl theory (sociology)Electronic engineeringEngineeringPhysicsSiliconControl (management)

Abstract

fetched live from OpenAlex

Electrostatic microelectromechanical systems (MEMS)-based torsional micromirrors are a fundamental building block for many optical network applications, such as optical wavelength-selective switches, configurable optical add-drop multiplexers and optical cross-connects. Although the device architecture, materials and fabrication processes determine the micromirrors' functioning space, one major technical challenge to achieving their full performance potentials is the controllability and stability of the tilting angle. In this paper, an electrostatic micromirror is designed and fabricated using a standard MEMS silicon-on-insulator (SOI) process. Active control approaches including gain scheduling and nonlinear proportional and derivative (PD) control are proposed. Both approaches can improve the performance of the mirror tilting and enhance the robustness of the structures to any stochastic perturbations. Furthermore, the nonlinear PD control can eliminate the micromirror “pull-in” phenomenon, hence significantly expanding the mirror tilt range, and as a result achieving enhanced device performance and functionality. The nonlinear PD control method is experimentally implemented and the results demonstrate the effectiveness of the approach.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesMeta-epidemiology (narrow)
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.462
Threshold uncertainty score1.000

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.009
GPT teacher head0.267
Teacher spread0.259 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it