Vertically-addressed test structures (VATS) for 3D IC variability and stress measurements
Bibliographic record
Abstract
We propose a new test array architecture-vertically-addressed test structures (VATS)-to experimentally characterize the within-tier and tier-to-tier process variations and through-silicon via (TSV) induced stress in 3D integrated circuits (ICs). The proposed VATS architecture utilizes the benefits of 3D integration to simultaneously provide high density, low I/O pin utilization, and high fidelity. A test chip featuring eight VATS arrays (>15,000 active devices) has been designed and fabricated in a two-tier, 130-nm 3D IC technology. Simulation results highlight the advantages of the proposed VATS architecture compared to conventional 2D test arrays.We also propose a radial filtering scheme to discriminate between process variations and the impact of TSV-induced stress in 3D ICs.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".