Optimized Pre-Treatment Process for MOS-GaN Devices Passivation
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Bibliographic record
Abstract
In this letter, we present an effective GaN surface passivation process, which was developed by optimizing the surface chemical pretreatment prior to the PECVD- SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> deposition. It is demonstrated that the electronic properties of the GaN/SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> interface are drastically influenced by the surface preparation conditions. Among the used chemicals, we found that KOH/HCl leads to the best GaN/SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> interface quality. MOS capacitors fabricated using this pretreatment have shown a near ideal capacitance-voltage characteristics, with a good surface potential modulation, small flatband voltage shift, low hysteresis, and no significant frequency dispersion. Using this optimized passivation process, AlGaN/GaN-based MOS-high electron mobility transistors (HEMTs) were fabricated. Electrical characterizations have shown up to four orders of magnitude lower gate leakage current and three orders of magnitude lower off-state current compared with the reference Schottky gate HEMT.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
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Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it