Capacitive RF MEMS Switches Fabricated in Standard 0.35-$\mu{\hbox{m}}$ CMOS Technology
Bibliographic record
Abstract
The objective of this paper is to investigate the integration of capacitive type RF microelectromechanical systems (MEMS) switches in a standard CMOS technology. A maskless monolithic integration process dedicated to electrostatically actuated capacitive type RF MEMS switches is developed and optimized. The fabricated switches consist of composite metal-dielectric warped membranes. The warped-plate structure is used to increase the capacitance ratio of the switch. The switches are fabricated using the interconnect metal and dielectric layers available in a standard 0.35-μm CMOS process. Measurement results for the first switch show an insertion loss less than 0.98 dB, a return loss below 13 dB up to 20 GHz in the up-state, and a down-state isolation of 12.4-17.9 dB from 10 to 20 GHz. The capacitance ratio is enhanced up to 91:1 using the warped-plate structure. A second cascaded switch consisting of two shunt capacitive switches and a slow-wave high-impedance transmission line section is designed and fabricated for high-isolation applications. The measured insertion loss for this switch is less than 1.41 dB up to 20 GHz, the return loss is below 19 dB, and the isolation is 19-40 dB across the frequency band from 10 to 20 GHz. The proposed RF MEMS switches can be used in millimeter-wave CMOS RF front-ends where multiband functionality and reconfigurability is required.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".