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Record W2177000151 · doi:10.1116/1.4934647

Nucleation and growth of ultrathin BaTiO3 films on single terminated Nb:SrTiO3 (100) substrates for ferroelectric tunnel junctions

2015· article· en· W2177000151 on OpenAlexafffund
Fabián Ambriz-Vargas, Ivan Velasco-Davalos, Reji Thomas, Andreas Ruëdiger

Bibliographic record

VenueJournal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2015
Typearticle
Languageen
FieldMaterials Science
TopicFerroelectric and Piezoelectric Materials
Canadian institutionsInstitut National de la Recherche Scientifique
FundersNatural Sciences and Engineering Research Council of Canada
KeywordsMaterials scienceFerroelectricityEpitaxySubstrate (aquarium)Piezoresponse force microscopySputter depositionOptoelectronicsNucleationBarium titanateLayer (electronics)Thin filmStrontium titanateSiliconSputteringNanotechnologyDielectric

Abstract

fetched live from OpenAlex

The authors report on a new table top radio frequency (RF)-magnetron sputtering unit and process for the sputter deposition of barium titanate thin films. Like silicon substrate in conventional electronics, strontium titanate (SrTiO3) is the substrate of choice in the emerging field of oxide electronics and hence Nb doped SrTiO3 n-type semiconducting substrates were considered. The authors observe substrate etching and nonstoichiometry in the film composition at high RF-power and low processing pressure, respectively. However, films deposited at 20 mTorr and 10 W of RF power resulted in stoichiometric BaTiO3. Layer by layer (two-dimensional) growth, prerequisite for epitaxial BaTiO3 on Nb:SrTiO3 (100) substrates, were realized at 600 °C. Hysteresis loops (phase angle versus applied voltage) in piezoresponse force microscopy confirm ferroelectricity of the films. Ultrathin epitaxial BaTiO3 on Nb:SrTiO3 (100) is of great interest as a ferroelectric tunnel junction with pronounced contrast between the ON/OFF tunnel resistance.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.001
Threshold uncertainty score0.002

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.031
GPT teacher head0.245
Teacher spread0.214 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations6
Published2015
Admission routes2
Has abstractyes

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Same venueJournal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and PhenomenaSame topicFerroelectric and Piezoelectric MaterialsFrench-language works237,207