Modification of porous SiOCH by first contact with water vapor after plasma process
Bibliographic record
Abstract
Porous low-k dielectrics used in integrated circuits interconnects are sensitive to plasma processes and exposure to moist ambient. In this paper, the authors use a vacuum and dry N2 sample transportation in conjunction with controlled atmosphere infrared spectroscopy (in transmission and in multiple internal reflections mode) to investigate the role of the first exposure to humidity on plasma-damaged porous low-k. They show that a porous low-k exposed to a N2/H2 or O2 plasma is irreversibly modified by the first exposure to water molecules. In the former case, Si-NHx and Si-H groups are converted into Si-OH while C=O and/or CH=NH groups are formed. In the latter case, irreversible water uptake as icelike water leads to a decrease of the density of isolated silanol groups. In both cases, no additional modifications are observed after a second cycle of water adsorption/desorption, meaning that subsequent water adsorption is reversible.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".