Modelling of Torsional Micromirrors with Springs made of Multiple Rotational Serpentine Elements
Bibliographic record
Abstract
This paper presents a matrix method for stiffness estimation of a general rotational serpentine spring and numerical simulation of electrostatically actuated torsional micromirrors with two symmetrically attached rotational serpentine springs having two serpentine cycles ( N=2). Modelling of this kind of micromirrors is carried out for the purpose of designing very soft planar springs for torsional micromirrors that are fabricated by the sophisticated surface micromachining technology. Torsional and bending spring constants of a rotational serpentine spring with 2 serpentine cycles are deduced by matrix method. Thus the static and dynamic performance of an electrostatica actuated torsional micromirror composed of these springs (N=2) are analyzed, and also simulated by the FEA tool (ANSYS), wherein both SOLID45 and TRANS126 elements are selected for structural meshing and electrostatic elements. The difference between analytical and simulated results is clearly shown and analyzed. Electrostatic effects of varied parameters of the springs are also analyzed.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".