Voltage-Current Measurement and Circuit Model Simulation to Characterize Electrical Properties of 40 kHz Capacitive Coupled Plasma (CCP) By Means of Pressure Variation
Bibliographic record
Abstract
The change of plasma conditions caused by pressure increasing can affect the change of electrical characteristic of plasma and influence in each of plasma process is done, its change can be estimated by means of voltage-current characteristics from V-I measurement and simulation of the plasma equivalent circuit model. This study is investigation of electrical characteristic of 40 kHz Capacitive Coupled Plasma (CCP) from V-I measurement were combined by simulation of the plasma circuit model, the goal study is observation of the change of electrical properties of plasma in different pressure conditions. The simulation results show that the output of circuit model in the simulation are similar with voltage-current characteristic from V-I measurement in 300 mTorr-900 mTorr pressure conditions. From the characterization, can be concluded that the electrical properties of CCP can be estimated by using the resistor and capacitor values of circuit model in the simulation to get similarity characteristic with voltage-current from V-I measurement.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.001 | 0.000 |
| Insufficient payload (model declined to judge) | 0.005 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".