Bimetallic Thermal Resists for Photomask, Micromachining and Microfabrication
Bibliographic record
Abstract
Photoresists and photomasks are two of the most critical materials in microfabrication and micromachining industries.As the shift towards shorter wavelength exposure continues, conventional organic photoresists and chromelquartz photomasks start to encounter problems.This thesis investigates and presents an alternative to organic photoresists and chromium photomasks which overcomes their intrinsic problems.A bimetallic thin film, such as BilIn and SnIIn, creates an inorganic thermal resist with many interesting properties.Both experiments and simulations demonstrate that this class of thermal resists can be converted by laser exposure with wavelengths from 213 nm to 830 nm, showing wavelength invariance.Simulations of the projected wavelength response show that BiIIn thermal resist works down to the 1 nm X-ray range.Exposed bimetallic thermal resists can be developed in two different acid solutions with excellent selectivity.A standard etch (RCA2) can strip the unexposed bimetallic film when photoresist rework is needed.Exposed bimetallic films are resistant to Si anisotropic wet etching and fluorine, O2 and chlorine plasma etching.The Bi/In thermal resist is the first reported resist that works for both wet chemical anisotropic Si etching and dry plasma etching.All these features make the bimetallic film a complete thermal resist.Another very important property of bimetallic thin films is the largest change in the optical absorption ever reported in the literature (3.0 OD before exposure and 0.22 OD after exposure, 365 nm), with the exposed areas becoming nearly transparent.The transmission of the exposed films depends on the laser writing power.Thus, BilIn resist and its class can be utilized as a direct-write photomask material for both binary and grayscale photomasks.Binary photomasks and grayscale photomasks were successfully created.2D and 3D structures were successfully generated in Shipley organic photoresists using a mercury lamp mask aligner with exposure conditions identical to those for conventional chrome masks.Material analyses show that the transformation after laser exposure of bimetallic thermal resists is an oxidation process.Laser-converted BilIn and S n h oxides have a structure similar to that of indium tin oxide films. To My Wife LijunMany men and women have done excellently, but you surpass them all.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.004 | 0.002 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".