Ferrofluid Sacrificial Microfabrication of Capacitive Pressure Sensors
Bibliographic record
Abstract
A novel production approach to the fabrication of capacitive micropressure sensors is reported. A magnetic fluid known as ferrofluid is used as the liquid-phase sacrificial layer in the microfabrication process, enabling extremely simple, fast, and low-cost production of the sensors while eliminating the need for photolithographic, bonding, and/or chemical processes. The entire sensor fabrication is performed at/near room temperature. The sensors are designed to be constructed on the 1.5 × 1.5-mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> stainless-steel chip, being micromachined to have capacitive cavities with 10-30 μm depths. A Parylene-C membrane with a titanium electrode is formed to seal the cavity by depositing it directly on top of the ferrofluid filled in the cavity. The ferrofluid is magnetically extracted from the cavity after the formation of the membrane, suspending it to establish the sensing capacitor. A highly linear response of 12.4 fF/KPa is obtained with the fabricated device. The temperature dependence of the sensor capacitance is experimentally characterized and reported as well.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".