Multilayer MoS2 Thin-film Transistors Employing Silicon Nitride and Silicon Oxide Dielectric Layers
Bibliographic record
Abstract
Bottom-gate molybdenum disulfide (MoS2) TFTs, having plasma-enhanced chemical vapor deposition (PECVD) gate-dielectric thin films, were fabricated from 80-100 nm thick mechanically exfoliated MoS2multilayers. Three separate gate dielectric structures were investigated consisting of: 1) a single PECVD SiNxlayer; 2) a dual PECVD SiOx/SiNxlayer; and 3) a reference thermal SiO2 layer. The devices fabricated on the bi-layer dielectric had a field-effect mobility (μe) of ~12 cm2/Vs and an ON/OFF ratio of ~105, while the TFTs on SiNxor thermal SiO2dielectric had μe~ 4 to 5 cm2/Vs and an ON/OFF ratio ~104to 105. The calculated interface trap density for the bi-layer dielectric devices was found to be 10× less than the SiNxdevices and 2x less than the thermal SiO2devices. The variation in the defect density was due to localized trap states in the dielectric/semiconductor interface.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".