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Record W2436346838 · doi:10.1515/ntrev-2015-0035

Electrical scanning probe microscopy of electronic and photonic devices: connecting internal mechanisms with external measures

2015· article· en· W2436346838 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

VenueNanotechnology Reviews · 2015
Typearticle
Languageen
FieldEngineering
TopicPhotonic and Optical Devices
Canadian institutionsChipworks (Canada)University of Waterloo
Fundersnot available
KeywordsScanning probe microscopyOptoelectronicsMaterials sciencePhotonicsScanning capacitance microscopyMicroscopyNanoelectronicsSemiconductorLaserDopantCapacitanceNanotechnologyScanning confocal electron microscopyOpticsPhysicsDoping

Abstract

fetched live from OpenAlex

Abstract The inner workings of semiconductor electronic and photonic devices, such as dopants, free charge carriers, electric potential, and electric field, are playing a crucial role in the function and performance of the devices. Electrical scanning probe microscopy (SPM) techniques have been developed and deployed to measure, with nanometric spatial resolution and high quantitative accuracy, the two-dimensional profiles of dopant, potential, electric field, and free carrier distribution, within unbiased and/or operating electronic and photonic devices. In this review paper, we summarize our latest SPM experimental results, including the scanning spreading resistance microscopy and scanning capacitance microscopy of terahertz quantum cascade lasers, scanning capacitance microscopy of non-volatile memory devices, scanning voltage microscopy of terahertz quantum cascade lasers, and scanning voltage microscopy of interband cascade lasers. Interpretation of the measured quantities are presented and calibrated, demonstrating that important internal physical quantities and inner mechanisms of device operation can be uncovered. It reveals that the novel SPM techniques would find more applications to the emerging semiconductor quantum devices and nanoelectronics.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.343
Threshold uncertainty score0.755

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0010.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.001
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.017
GPT teacher head0.252
Teacher spread0.235 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it