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A study of 2-dimensional electrostatic torsional micromirror

2009· article· en· W247083122 on OpenAlexaff
H. Imam, Yuan Ma

Bibliographic record

Venuenot available
Typearticle
Languageen
FieldEngineering
TopicAdvanced MEMS and NEMS Technologies
Canadian institutionsDalhousie University
Fundersnot available
KeywordsGimbalMicroelectromechanical systemsFinite element methodSurface micromachiningSoftwareTorsion (gastropod)Mechanical engineeringComputer scienceHingeElectronic engineeringEngineeringMaterials scienceFabricationStructural engineeringOptoelectronicsAerospace engineering

Abstract

fetched live from OpenAlex

Many industry experts predict that the future of optical communication system depends on the development of all-optical components for switching and routing purpose. MicroElectroMechanical System (MEMS) technology provides excellent solution to micro-mirror devices for this purpose. This paper reports on the analysis of a 2-Dimensional (2D) electrostatically actuated torsional MEMS micro-mirror. The micro-mirror consists of a traditional gimbal structure allowing steering actions in two orthogonal directions. The device includes two sets of torsion hinges and 4 independent control electrodes. The device was modeled analytically. The equations describing device behaviors were validated using a numerical mathematical software. Key structure performance was simulated by coupled field electrostatic and structural analysis using Finite Element Analysis (FEA) multi-physics modeling software. The prototype device was fabricated using a standard surface micromachining MEMS process and the experimental setup and results have also been discussed in the paper.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.022
Threshold uncertainty score0.215

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.008
GPT teacher head0.234
Teacher spread0.226 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one teacher head, not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations4
Published2009
Admission routes1
Has abstractyes

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