(Invited) High Throughput ALD of Al<sub>2</sub>O<sub>3</sub> Layers for Surface Passivation of Silicon Solar Cells
Bibliographic record
Abstract
A high-throughput ALD system based on wafer transport in an atmospheric gas bearing was developed. Line-shaped TMA and H2O precursor zones are present in the direction perpendicular to transport takes place. Thin Al2O3 films of 4-24 nm were deposited at wafer speed of 160-230 mm/s (corresponding to a throughput of 2400 - 3600 wph). After annealing and firing the films show good passivation. Effective minority carrier lifetimes measured on 2.3 ohm cm p-type c-Si wafers at excess carrier density of 1E15 cm-3 reach values of 0.3-2.5 ms depending on surface preparation, annealing steps and film thickness. No degradation of films during firing was observed and the lifetime values remain stable in time. The Levitrack system presented in this paper is expected to meet the requirements of the PV industry.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".