CMUTs with improved electrical safety & minimal dielectric surface charging
Bibliographic record
Abstract
Capacitive micromachined ultrasound transducers (CMUTs) offer many potential advantages over piezoelectric transducers, but have not yet seen widespread implementation. Possible reasons for this may include key issues of (1) long-term device reliability and (2) electrical safety issues associated with relatively high voltage electrodes on device surfaces which could present an electrical safety hazard to patients. A double SOI CMUT design which addresses both these issues is presented. A 1-D model of dielectric surface charging, which suggests that minimal surface roughness of the dielectric layer can minimize surface charge accumulation is also proposed. Fabricated devices are engineered to minimize dielectric surface roughness. To provide maximum electrical safety to future patients, CMUT devices were engineered with the top membrane serving as a ground electrode. Bottom electrodes are individually-addressable. Our devices were modeled using a finite-element package. The experiment results show excellent agreement with modeled performance. Charge effects were explored by studying deflection hysteresis during snapdown and snapback cycles in the limit of long snapdown durations to simulate maximal dielectric charging conditions.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.001 | 0.001 |
| Open science | 0.001 | 0.001 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".