A MEMS<i>XY</i>-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution
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Bibliographic record
Abstract
This paper reports a microelectromechanical systems (MEMS) based XY-stage integrating compliant motion amplification mechanism for nanopositioning at sub nanometer resolution. The MEMS stage is driven by bidirectional Z-beam electrothermal actuators that generate large output forces to actuate the motion amplification mechanism. The motion amplification mechanisms are used in their inverse (motion reduction) mode to convert micrometer input displacements (from the Z-beam actuators) into nanometer output displacements at a constant motion reduction ratio with good linearity. This unique design significantly enhances the positioning resolution of the XY-stage. An analytical model is developed to predict output displacements of the XY-stage as a function of the input voltages applied to the Z-beam actuators, and the predicted results agree with the experimental results. Capacitive displacement sensors are arranged along both X- and Y-axes for measuring the input displacements of the amplification mechanisms, enabling closed-loop nanopositioning control of the XY-stage. The device calibration results show that, within an actuation voltage of ±15 V, the MEMS stage offers a motion range close to ±1 μm and a displacement resolution better than 0.3 nm −1.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it