Copper coplanar waveguides on Si substrates for frequencies up to 40 GHz
Bibliographic record
Abstract
This paper presents an experimental study of copper coplanar waveguides fabricated on silicon substrates suitable for use in post-process CMOS IC fabrication. The waveguides were separated from the substrate by thick layers of polyimide. Waveguide performance is compared to that of aluminum control devices underlayed with silicon dioxide. The lower resistance of the copper and improved substrate isolation obtained with the low-k polyimide dielectric provide a significant performance boost compared to the controls. Application of the copper/polyimide waveguides in a 10 GHz distributed amplifier in 0.35 μm CMOS technology is examined. A significant performance advantage is observed for the Cu/Polyimide CPWs compared to Al/SiO2 controls.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.001 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.001 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".