AlGaN/GaN MOS-HEMT Device Fabricated Using a High Quality PECVD Passivation Process
Bibliographic record
Abstract
In this letter, an AlGaN/GaN MOS-HEMT was demonstrated using a 5-nm-thick SiOxdielectric layer deposited by plasma enhanced chemical vapor deposition (PECVD) as a gate insulator. The fabricated device exhibits a maximum IDScurrent of 570 mA/mm at VGS=+ 3 V, an ON-state resistance (Rbioscon) of 7.3 · mm, a maximum transconductance peak of 180 mS/mm, and a gate leakage current below 1 nA/mm at a gate voltage of +/- 3 V. Moreover, a very low pinchoff voltage (Vp) shift was observed during the IDS-VGShysteresismeasurements giving an estimated interface state density (Dit) as low as 3.9 × 1011cm-2eV-1. These results demonstrate the high quality of the SiOx/AlGaN interface and the efficiency of the passivation process. To the best of our knowledge, this is the lowest reported Diton an AlGaN/GaN MOS-HEMT device using a PECVD deposition technique.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".