Wafer‐level vacuum‐encapsulated silicon resonators with arc‐welded electrodes
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Bibliographic record
Abstract
This work presents wafer‐level vacuum‐encapsulated silicon resonators that utilise movable electrodes and arc welding in order to achieve deep sub‐micron transduction gaps. The devices are fabricated using micro‐electro‐mechanical systems (MEMS) integrated design for inertial sensors (MIDIS) process, a commercial pure‐play MEMS process, offered by Teledyne DALSA Semiconductor Inc.. The default minimum transduction gap in the MIDIS process is 1.5 μm. Here, the work introduces a technique to permanently reduce the transduction gap of the resonator using localised arc welding to a designed width of ∼200 nm. The prototype Lamé mode resonators are encapsulated in an ultra‐clean 10 mTorr vacuum cavity that ensures long‐term stability. The quality factor was measured to be 1.37 million at a resonance frequency of 6.89 MHz. With the narrower gap, the motional resistance of the resonators is reduced by a factor of ten times.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it