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Record W2760444852 · doi:10.1116/1.4991898

Camera for transmission He+ ion microscopy

2017· article· en· W2760444852 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

VenueJournal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2017
Typearticle
Languageen
FieldEngineering
TopicIntegrated Circuits and Semiconductor Failure Analysis
Canadian institutionsSimon Fraser University
FundersNatural Sciences and Engineering Research Council of CanadaCanada Foundation for Innovation
KeywordsIon beamBeam (structure)OpticsMaterials scienceIonIntensity (physics)Focused ion beamAtomic physicsChemistryPhysics

Abstract

fetched live from OpenAlex

The intensity of transmitted He+ ions and atoms from a focused He+ beam was measured using a direct impact onto a camera located 20 cm below the sample. The camera consisted of a 256 × 256 array of Si p-i-n diodes (pixels) each 55 × 55 μm2 in area. Static, focused beam intensity profiles show a uniform distribution, as expected from the small de Broglie wavelength (80 fm) and coherent source. From the size of the beam spot, the half-angle beam convergence angle can be directly measured and compared with theoretical predictions based on column geometries. The detector count rate was consistent with an efficiency of 75%, when compared to the current measured by electrostatic beam blanking. The intensity profile of a neutral atom component was measured to have a 17% peak or 1.3% integrated intensity at a beam energy of 25 keV, compared to the ion beam. The intensity of transmitted particles through 50 nm amorphous carbon was less than that of graphite flakes, likely affected by thickness and channeling. Transmission images as a function of time to form 20 nm holes in graphite were obtained.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.052
Threshold uncertainty score0.845

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0010.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0010.000
Science and technology studies0.0010.001
Scholarly communication0.0000.001
Open science0.0010.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.013
GPT teacher head0.242
Teacher spread0.229 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it