Design, fabrication and characterization of compact 4-bit RF MEMS capacitor bank in standard CMOS 0.35μm process
Bibliographic record
Abstract
This paper reports on the design and fabrication of a 4-bit switched capacitor bank designed to operate over the frequency range of 3-10 GHz with a tuning range of up to 10:1. An optimized mask-less CMOS post-processing technique is used to fabricate the 0.6 mm × 0.9 mm capacitor bank. We propose a procedure employing dry etching with cryogenic cooling to tune the residual stress in the beams. The capacitor is analyzed both theoretically and experimentally. The analysis of the measured value ~ 5 of Q suggests an approach to enhance the capacitor's Q. The measurement demonstrates the 16 different states covering the range of 0.15-1.2 pF with no sign of self-resonance up to 10 GHz.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".