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Record W2789915583 · doi:10.1109/tcpmt.2018.2794202

Development of Embedded Redistribution Layer-Based Silicon Interposer for 3-D Integration

2018· article· en· W2789915583 on OpenAlex

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.
fundA Canadian funder is recorded on the work.

Bibliographic record

VenueIEEE Transactions on Components Packaging and Manufacturing Technology · 2018
Typearticle
Languageen
FieldEngineering
Topic3D IC and TSV technologies
Canadian institutionsUniversity of Alberta
FundersNatural Sciences and Engineering Research Council of CanadaGovernment of AlbertaCMC Microsystems
KeywordsMaterials scienceSiliconFabricationElectrical conductorRedistribution (election)OptoelectronicsInterposerContact resistanceComposite materialNanotechnologyElectronic engineeringEngineering physicsLayer (electronics)EngineeringEtching (microfabrication)

Abstract

fetched live from OpenAlex

Silicon interposers that are typically composed of redistribution layers (RDLs) and through-silicon vias have become a popular alternative approach to achieve 3-D integration. However, issues including the long metallization duration and the risk of unacceptable interfacial resistance or even disconnection are prohibiting their wider adoption. In this paper, by substituting RDLs with conductive polymer-filled trenches at the bonding interface, a silicon interposer architecture with faster fabrication speed and better interfacial connection was developed. Ag-based and carbon-based (C-based) conductive polymers with different viscosities were tested under varying vacuum suction conditions. It was found that the filling ratio would increase more efficiently with the driving pressure. Besides, measurements indicated the average resistance of channels filled with Ag-based conductive polymers was in the range of 40-55 Ω. Furthermore, their resistivity stability and bonding strength to Cu and Al had proven to be promising during the temperature increase.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.492
Threshold uncertainty score0.701

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.023
GPT teacher head0.247
Teacher spread0.224 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it