MétaCan
Menu
Back to cohort
Record W2796606746 · doi:10.22215/etd/2015-10905

Development of Volatile Inorganic Compounds and Their Application for Chemical Vapour Deposition of Metal and Metal Oxide Thin Films

2015· dissertation· en· W2796606746 on OpenAlex
Agnieszka Kurek

Why this work is in the frame

A frame that forgets how it found something cannot be audited. These are the routes that admitted this work.

affAt least one author lists a Canadian institution in the pinned OpenAlex snapshot.

Bibliographic record

Venuenot available
Typedissertation
Languageen
FieldMaterials Science
TopicSynthesis and properties of polymers
Canadian institutionsCarleton University
Fundersnot available
KeywordsCopperMetalReactivity (psychology)Materials scienceThin filmOxideChemical vapor depositionEtching (microfabrication)Deposition (geology)Chemical engineeringThermal decompositionCombustion chemical vapor depositionThermal stabilityInorganic chemistryNanotechnologyChemistryLayer (electronics)MetallurgyOrganic chemistryCarbon film

Abstract

fetched live from OpenAlex

Chemical vapour deposition is a necessary and important technology for the manufacture of nano-thin metal films.The reactivity and thermal stability of the metal complexes used in this process are key to the deposition process.Through logical design, guanidinate ligands have evolved into iminopyrrolidinates to prevent decomposition pathways.These ligands were first tested on aluminum metal centres.Iminopyrrolidinates have been further stabilized with additional methyl moieties and have led to promising new copper precursors.Copper metal is desirable for interconnecting material in electronics due to its high conductivity.The reactivity of 1,3-diisopropyl-imidazolin-2-ylidene copper hexamethyl disilazide has been explored and yielded three new copper metal compounds.Sputtered thin films of gold have been used in metal assisted chemical etching to produce high aspect ratio structures on the surface of silicon substrates.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

Full frame distilled prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.

metaresearch head score (Codex)0.000
metaresearch head score (Gemma)0.000
Version: codex-gemma-dda1882f352aValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: Empirical
Teacher disagreement score0.022
Threshold uncertainty score0.509

Codex and Gemma teacher scores by category

CategoryCodexGemma
Metaresearch0.0000.000
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.000
Open science0.0000.000
Research integrity0.0000.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.018
GPT teacher head0.246
Teacher spread0.228 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Quick stats

Citations0
Published2015
Admission routes1
Has abstractyes

Explore more

Same topicSynthesis and properties of polymersFrench-language works237,207