GROWTH CHARACTERISTICS AND PROPERTIES OF AL-DOPED ZnO THIN FILMS BY DC MAGNETRON SPUTTERING FROM AZOY<sup>®</sup> TARGET
Bibliographic record
Abstract
Transparent conducting Al-doped ZnO (AZO) thin films were deposited on soda-lime glass substrates by DC magnetron sputtering with a novel sintered ceramic target, AZOY ® that contains a small amount of Y 2 O 3 in addition to Al 2 O 3 and ZnO. The effect of substrate temperature (T s ) on the structural, electrical and optical properties of the prepared AZO films was evaluated extensively. By elevating T s , both the electrical conductivity and optical transmittance in the Vis/NIR region of the film could be effectively improved. The substrate heating is closely related to the crystallinity and the surface morphology of the deposited films. It is noteworthy that by employing this target material, high quality AZO thin films could be deposited with a simple and cost effective DC magnetron sputtering system.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".