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Record W2800390634 · doi:10.1109/jmems.2018.2828423

Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization

2018· article· en· W2800390634 on OpenAlexafffund
Zhou Zheng, Shuai Na, Albert I. H. Chen, Zhenhao Li, Lawrence L. P. Wong, Zhendong Sun, Yao Yao, Ping Liu, John T. W. Yeow

Bibliographic record

VenueJournal of Microelectromechanical Systems · 2018
Typearticle
Languageen
FieldEngineering
TopicUltrasonics and Acoustic Wave Propagation
Canadian institutionsUniversity of Waterloo
FundersChina Scholarship CouncilNatural Sciences and Engineering Research Council of CanadaCanada Research ChairsCMC Microsystems
KeywordsCapacitive micromachined ultrasonic transducersTransducerUltrasonic sensorMaterials scienceAcousticsCapacitive sensingPiezoelectricityPMUTBandwidth (computing)Electrical engineeringEngineeringTelecommunicationsPhysics

Abstract

fetched live from OpenAlex

Capacitive micromachined ultrasonic transducers (CMUTs) have shown great potential to make a strong impact on ultrasound imaging technologies over the years. However, a critical weakness of CMUTs is their relatively low output pressure at transmission. To address this, we present a novel dual-element ultrasonic transducer that incorporates two transducer technologies by using a circular commercial piezoelectric element for ultrasound transmission and an annular CMUT element for reception. The hybrid transducer combines the broad bandwidth and high receive sensitivity of the CMUT and the high output pressure of the piezoelectric transducer to improve the overall sensitivity and axial resolution. The annular CMUT is designed, fabricated, and concentrically aligned with the piezoelectric probe via a custom housing. A through-wafer etching scheme based on deep reactive-ion etching is developed to create the CMUT annulus. Immersion characterization reveals that the CMUT has a center frequency of 2.63 MHz, a -6-dB fractional bandwidth of 131%, and a receive sensitivity of 22.57 mV/kPa, compared with 2.34 MHz, 42%, and 4.28 mV/kPa of the piezoelectric probe. The round-trip measurements show that the hybrid dual-element transducer improves the axial resolution by 25.58% and the signal-to-noise ratio by 8.55 dB over the commercial piezoelectric probe.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.001
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Bench or experimental · Consensus signal: Bench or experimental
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.001
Threshold uncertainty score0.003

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0010.001
Meta-epidemiology (narrow)0.0000.000
Meta-epidemiology (broad)0.0000.000
Bibliometrics0.0000.000
Science and technology studies0.0000.000
Scholarly communication0.0000.001
Open science0.0010.001
Research integrity0.0010.000
Insufficient payload (model declined to judge)0.0000.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.016
GPT teacher head0.212
Teacher spread0.197 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designBench or experimental
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

Quick stats

Citations27
Published2018
Admission routes2
Has abstractyes

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