Wireless <italic>LC</italic>-Type Passive Humidity Sensor Using Large-Area RF Magnetron Sputtered ZnO Films
Bibliographic record
Abstract
We report on a ZnO-based LC-type passive humidity sensor (HS) using a scalable, large-area thin-film semiconductor fabrication process. The reported sensor is capable of monitoring relative humidity (RH) remotely. The fabricated sensor is 30 mm in diameter and comprises an LC resonator formed via an octagonal planar inductor and a moisture sensitive interdigitated ZnO capacitor in series. A printed circuit board reader coil, which can sense the sensor output from <;25 mm distance, is also reported. The HS is demonstrated to read 30%-90% of RH by interrogating the change in resonance frequency (f <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">R</sub> ) of the reader-senor system. The reading resolution was ±2.38% RH and the sensor sensitivity ranged from 53.33 kHz to 93.33 kHz for a 1% change in RH during measurements above 45% RH. Experimental results also showed that the fabricated sensor is operational for a range of 0 °C-75 °C as long as calibration is performed for temperature drifts of ≥±3 °C. The reported results are promising to expedite the deployment of novel inexpensive sensor, for example, in sealed locations to remotely monitor humidity without a need for on-sensor power.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.001 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".