Monolithic IPD-MEMS Technology and Its Applications to High-<inline-formula> <tex-math notation="LaTeX">$Q$ </tex-math> </inline-formula> Switched Capacitor Banks and Variable True-Time-Delay Networks
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Bibliographic record
Abstract
A low-loss monolithic integrated passive device-microelectromechanical systems (IPD-MEMS) technology process on an alumina substrate is proposed. Two applications are investigated both theoretically and experimentally using the proposed IPD-MEMS process: 1) a high-quality-factor switched capacitor bank, and 2) a variable true-time-delay (TTD) network with a fine resolution. The measured IPD-MEMS capacitor bank exhibits a variable capacitance of 0.63-3.8 pF with Q-values between 100 and 300 at 1 GHz. A low-loss highly miniature IPD-MEMS digital delay line, with a delay ranging between 40 and 120 ps, is measured. A maximum 1-dB insertion loss is achieved for this digital TTD network of up to 2 GHz with a footprint of 2 mm × 1.3 mm. To realize a fine delay step resolution, a barium-strontium-titanate varactor is added to this IPD-MEMS digital design. A continuous maximum group delay between 70 and 148 ps with a fine resolution of 0.6 ps is achieved with an overall size of 2.9 mm × 1.6 mm.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.001 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.003 | 0.001 |
| Science and technology studies | 0.001 | 0.001 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.002 | 0.002 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it