Stepwise Sulfurization from MoO<sub>3</sub> to MoS<sub>2</sub> via Chemical Vapor Deposition
Bibliographic record
Abstract
Chemical vapor deposition (CVD) is used widely to synthesize monolayer and few-layer transition metal dichalcogenide molybdenum disulfide (MoS 2 ), a two-dimensional (2D) material with various applications in nanoelectronics, catalysis, and optoelectronics. However, the CVD synthesis of 2D MoS 2 is highly sensitive to small changes in growth parameters and the growth mechanism has not been extensively studied. This work systematically investigates the effect of sulfur concentration on CVD synthesis of MoS 2 using molybdenum trioxide (MoO 3 ) and sulfur precursors. We find that with increasing concentration of sulfur vapor, intermediate products of molybdenum dioxide (MoO 2 ) and molybdenum oxysulfide (MoOS 2 ) can form during a stepwise sulfurization of MoO 3 to the final product of MoS 2 . The intermediate MoOS 2, formed due to sulfur vapor deficiency, can be fully converted to MoS 2 with further sulfurization. We show that the local sulfur to molybdenum vapor ratio at the growth substrate critically determines the growth products. This study thus highlights the importance of keeping the molar ratio of sulfur to molybdenum vapor well in excess of the stoichiometrically required ratio of 3.5:1 in order to grow 2D MoS 2 .
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".