Reconfigurable MEMS latching-type capacitors for high power applications
Bibliographic record
Abstract
Abstract This paper reports the design and characterization of two reconfigurable MEMS discrete capacitor banks for high power and low frequency applications. The first design is a 3-bit capacitor bank built using three parallel-connected series-switched comb-drive capacitors with appropriately scaled values. The second design is a compact discretized comb-drive varactor that can be operated as 2-bit or 3-bit capacitor bank depending on the number of latched states. Both devices are demonstrated using the METALMUMP process where 20 µ m-thick plated nickel is the only structural and metal layer. The MEMS switches use thermal actuation with chevron actuator design. This allows for large displacements at relatively low actuation voltages. Using mechanical latching for both designs, the switch reconfiguration energy is minimized. The relatively very high mechanical stiffness inherent to both thermal actuator designs provides an excellent immunity to self-actuation at high RF power levels. The proposed MEMS switches are capable of operating under low-pressure conditions (e.g. in a package), without degradation of their thermo-mechanical performance.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.002 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".