Beam current stability improvements of negative carbon ions extraction from a multi-cusp ion source
Bibliographic record
Abstract
Ion implantation requires a high beam current stability to ensure a uniform implantation dose across the wafers. This requires ion sources with a stable extraction system to achieve a high beam current stability. Our goal is to extract 0.5 mA of C2- with less than 10 glitches per hour, with a glitch defined as any variation greater than +/- 5% of the nominal beam current. The beam energy should be between 10 keV and 30 keV while the normalized 4 RMS emittance should be less than 1 mm·mrad. We’ve shown that high negative carbon ion current densities could be obtained with a multi-cusp ion source when acetylene was used as the feed gas (0.27 mA of C2-), but there was significant sparking between the electrodes, which led to frequent beam current glitches (>1000/hour). In this study, we investigate the different factors that contribute to the sparking between the electrodes. We found that the sparking is highly correlated to the dumping of the co-extracted electrons and the beam strike on the electrodes. Extraction simulations were completed to determine how the electron dumping can be improved and how the beam strikes on the electrodes can be reduced. Furthermore, we modified the magnetic configuration in the plasma chamber to decrease the electron density close to the extraction aperture, which reduced the co-extracted electron current by a factor of almost 5 and reduced sparking frequency to about 20 glitches per hour. However, there was a corresponding decrease in the extracted beam current due to the smaller aperture sizes needed to reduce the sparking, with only 0.05 mA of C2-.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".