Highly Performant Integrated pH-Sensor Using the Gate Protection Diode in the BEOL of Industrial FDSOI
Bibliographic record
Abstract
This is the first demonstration of a CMOS pH-sensor using the gate protection diode of standard FDSOI transistors in the BEOL. The extremely steep switching of the drain current induced by an exploitation of the DIBL effect is used for fabrication of extremely sensitive pH-sensors. The back gate voltage at which the abrupt switching of drain current occurs depends on the potential at the gate protection diode. Integrating the pH sensing film on this diode BEOL metal, the shift depends on the pH value of the liquid which creates a proportional potential. The abrupt switching (as small as 9 mV/decade) of the drain current can give a theoretical maximum sensitivity of 6.6 decade of drain current change per unit pH. In this paper, we report an experimental sensitivity of 1.25 decade/pH which is superior to state-of-the-art CMOS pH sensors which have a maximum sensitivity of 0.9 decade/pH.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".