Equilibrium Deposition Rate of Silicon in Si-I<sub>2</sub>and Si-H<sub>2</sub>-Cl<sub>2</sub>Systems
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Bibliographic record
Abstract
The thermodynamic equilibrium deposition rates of silicon in Si-I2 and Si-H2-Cl2 systems were analyzed. These rates are discussed in terms of their applicability in industrial processes of Si purification. The behavior of silicon deposition for silicon tetraiodide (SiI4), silicon di-iodide and whole spectrum of Silicon-Hydrogen-Chlorine compounds were evaluated within a wide range of pressures and temperatures. A strong agreement between the theoretical model predictions and the experimental data was found for the SiI4 compound. Alternatives to the Herrick-Krieble's approximation for experimental SiI4 decomposition rates have been proposed for the actual operating pressures. The di-iodine technology has been analyzed in terms of its deficient SiI2 formation at 1200°C and the subsequent Si deposition and SiI4 formation at 800–900°C. An original approach was created to analyze the theoretical results for the Si-H2-Cl2 system using quasi-binary system coordinates: SiH4-SiCl4. The analysis of the results shows that the silicon deposition rate is independent of the temperature and the pressure. Such independence assumes that one, single mechanism governs the decomposition reaction for the (Si-H2-Cl2) system. It was concluded that a homogeneous nucleation is taking place for all Silicon-Hydrogen-Chlorine compounds within a temperature of 800–1400°C and a pressure of 1–100 atm.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.002 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.001 | 0.002 |
| Science and technology studies | 0.000 | 0.002 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.001 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it