CMOS-MEMS 8-BIT MEMDAC NANOPOSITIONER WITH INTEGRATED POSITION SENSING AND DIGITAL CONTROL
Bibliographic record
Abstract
An 8-bit MEMDAC (microelectromechanical digital-toanalog converter) with nanometric position sensing and digital control has been implemented in a CMOS-MEMS process. The device is intended for use in scanning probe lithography and requires a closed-loop position resolution of 1 nm. Lateral electrothermal actuators provide a displacement of 8m to each of the 8 inputs of the compliance network. The step size corresponding to a transition of the least significant bit (LSB) is ~31nm. A piezoresistive sensor integrated in the LSB has an output-referred position resolution of 0.39nm. The design has been extended to 2 dimensions with an integrated cantilever and CMOS electronics to reduce pincount.
Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.
How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.001 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.001 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".