Tetraallyltin precursor for plasma enhanced atomic layer deposition of tin oxide: Growth study and material characterization
Bibliographic record
Abstract
In this letter, the authors report on the application of tetraallyltin (TASn) as an Sn-precursor for plasma enhanced atomic layer deposition (PEALD) of tin oxide (SnO2) thin films. The selection procedure for the TASn precursor is discussed. Tin oxide PEALD growth is shown to be self-limiting with a constant growth-per-cycle of 0.046 ± 0.002 nm/cycle in the substrate temperature (Tsub) range of 50–150 °C. Optical constants, chemical bonding, and electronic properties of as-grown PEALD films were characterized to evaluate the quality of tin oxide film obtained with the TASn precursor. A 21.6 nm tin oxide film grown at Tsub = 50 °C exhibited an indirect optical bandgap (Eg) of 2.94 eV and appeared amorphous from the glancing incidence x-ray diffraction pattern. Binding energy difference ΔBE(O1s, Sn3d5/2) = 43.77 eV and valence band emission in x-ray photoelectron spectroscopy showed that these were near-stoichiometric SnO2 with the relative O:Sn atomic ratio of 1.98 (or SnO1.98). Moreover, room temperature electrical resistivity ρele = 13.1 ± 1.6 mΩ cm, with electron concentration Ne = (3.78 ± 0.79) × 1019 cm−3 and Hall mobility μe = 13.2 ± 2.0 cm2 V−1 s−1, showed that electrical characteristics of the as-grown tin oxide films with the TASn precursor are comparable to those grown using other standard Sn precursors.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".