Achieving High Quality Factor Without Vacuum Packaging by High Density Proof Mass Integration in Vibration Energy Harvesters
Bibliographic record
Abstract
This paper presents a simple approach to control fluidic damping, and thereby improve the mechanical quality factor at ambient pressure, of AlN-based piezoelectric resonant energy harvesters by using high density proof masses. Using models adapted from the literature, and accounting for the simultaneous transverse and rotational motion of the cantilever beam, scaling laws are extracted for the fluidic quality factor, Qf, as a function of the fluid damping regime, either due to drag or squeeze film forces. Subsequently, we demonstrate the utility of the scaling laws by characterizing silicon-based devices and tungsten tip masses. By accounting for other damping sources and the device operating frequency, we achieve close to an order of magnitude improvement on Qf with this strategy, going from 398 to 4193. Beside potential for footprint reductions and higher power outputs, these results suggest that high density proof mass integration can be an alternative to vacuum packaging for MEMS based vibration energy harvesting.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.001 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.001 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".