Time‐resolved analysis of the precursor fragmentation kinetics in an hybrid PVD/PECVD dusty plasma with pulsed injection of HMDSO
Bibliographic record
Abstract
Abstract Plasma sampling mass spectrometry (PSMS) has been carried out to study the fragmentation kinetics of hexamethyldisiloxane (HMDSO) in a low‐pressure, axially asymmetric argon rf discharge designed for the growth of nanocomposite thin films through a hybrid PVD/PECVD method. Experiments have been conducted with a pulsed injection of HMDSO over a 5‐s period. Plasma conditions have been chosen to favor formation and disappearance of dust occurring in cycles of a few hundred seconds. The dissociation degree of HMDSO and the relative intensities of HMDSO‐related fragments are reported and analyzed regarding these two specific time‐scales. PSMS showed that formation of dust increases HMDSO dissociation. The same result can be deduced from the particle balance equation of HMDSO using the electron density and temperature obtained from optical emission spectroscopy as the only input parameters. For HMDSO, electron‐impact dissociation is the dominant loss pathway over diffusion and recombination on the reactor walls. Small C xH y compounds and H 2 are mostly generated from surface recombination mechanisms and lost by electron‐impact dissociation.
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How this classification was reachedexpand
Full frame machine prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.
Distilled classifier scores by category (both heads)
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.001 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".