Increasing threshold voltage and reducing leakage of AlGaN/GaN HEMTs using dual-layer SiN <i> <sub>x</sub> </i> stressors
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Bibliographic record
Abstract
Abstract In this work, AlGaN/GaN HEMTs with dual-layer SiN x stressors (composed of a low-stress layer and a high-stress layer) were investigated. The low-stress padding layer solved the surface damage problem which was caused during the deposition of the high-stress SiN x and provided a good passivated interface. The HEMTs with the dual-layer stressors showed a 1 V increase in the threshold voltage ( V th ) with comparable DC and RF amplification performance to the baseline devices. Moreover, the off-current ( I off ) was shown to be reduced by one to three orders of magnitude in the strained devices. The reduction in the off-currents was a result of the lower electric field in AlGaN, which suppressed the gate injection current. These improvements using the dual-layer stressor scheme supports strain engineering as an effective approach in the pursuit of the normally-off operation of AlGaN/GaN HEMTs.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.001 |
| Science and technology studies | 0.000 | 0.001 |
| Scholarly communication | 0.000 | 0.001 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
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Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
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