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Record W3007295782 · doi:10.1109/tsm.2020.2976714

Color Difference Detection of Polysilicon Wafers Using Optimized Support Vector Machine by Magnetic Bacteria Optimization Algorithm With Elitist Strategy

2020· article· en· W3007295782 on OpenAlexaff
Baosu Guo, Jichao Zhuang, Yukang Wu, Wenwen Wu, Fenghe Wu, Qingjin Peng

Bibliographic record

VenueIEEE Transactions on Semiconductor Manufacturing · 2020
Typearticle
Languageen
FieldEngineering
TopicIndustrial Vision Systems and Defect Detection
Canadian institutionsUniversity of Manitoba
FundersJiangsu Key Laboratory of Precision and Micro-Manufacturing TechnologyNatural Science Foundation of Hebei ProvinceNational Natural Science Foundation of China
KeywordsSupport vector machineWaferArtificial intelligenceFeature (linguistics)AlgorithmComputer sciencePattern recognition (psychology)Engineering

Abstract

fetched live from OpenAlex

A support vector machine (SVM) is an important method in the detection and classification of the color difference on a polysilicon wafer. However, the accuracy of a SVM is affected by its feature vector and parameters. Owing to the complex color information and random texture features on the wafer surface, the feature design is extremely complicated. Meanwhile, a SVM optimized using a popular intelligent algorithm easily falls into a local optimum, and the convergence of the algorithm needs to be improved. Therefore, a classification method is proposed for detecting the color difference from multi-scale features in polysilicon wafer images. First, to extract the features, an image segmentation method is devised based on the maximum region contrast, which effectively applies a threshold segmentation of the wafer images. Second, the multi-scale features and color representations in different color spaces are used to construct a nine-dimensional feature vector that sufficiently describes the surface characteristics of the wafer. An approach to optimize the SVM is finally proposed using a magnetic bacteria optimization algorithm based on an elitist strategy for parameter optimization. The optimum individual of each generation is used to adjust the magnetic moment such that the solution approaches the optimal direction and enhances the global search ability. A fitness function is also introduced to improve the diversity of the solutions through a cross-validation method. The experiment results show that the proposed algorithm achieves an accuracy of 98.3% with a better classification performance than the other methods and that the color difference of polysilicon wafers can be effectively detected.

Fetched live from OpenAlex and de-inverted. Abstracts are not stored in this database: the inverted indexes are 8.6 GB of the frame’s 9.3 GB of text, and the host has 13 GB free.

How this classification was reachedexpand

Full frame machine prediction

Teacher imitation

Not calibrated prevalence, not ground truth. Human validation pending. The Gemma side is a direct model label for every work in the frame, read from the title-only record. The Codex side is a classifier learned from the 10,348 direct Codex labels and calibrated to design-weighted sample rates; fields without enough sample support carry no Codex call. Candidate is the union of the two sides; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels.

metaresearch head score (Codex)0.001
metaresearch head score (Gemma)0.001
Version: metacan-v3-hybrid-931329e0061cValidation status: machine_predicted_unvalidated
Candidate categoriesnone
Consensus categoriesnone
DomainCandidate signal: none · Consensus signal: none
Study designCandidate signal: Simulation or modeling · Consensus signal: none
GenreCandidate signal: Empirical · Consensus signal: none
Teacher disagreement score0.002
Threshold uncertainty score0.005

Distilled classifier scores by category (both heads)

CategoryCodexGemma
Metaresearch0.0010.001
Meta-epidemiology (narrow)0.0010.000
Meta-epidemiology (broad)0.0010.001
Bibliometrics0.0010.000
Science and technology studies0.0000.000
Scholarly communication0.0010.001
Open science0.0010.000
Research integrity0.0010.001
Insufficient payload (model declined to judge)0.0010.000

Machine scores (provisional)

The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.

Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.

Opus teacher head0.018
GPT teacher head0.209
Teacher spread0.191 · how far apart the two teachers sit on this one work
Validation statusscore_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it

Classification

machine, unvalidated

Machine predicted; a candidate call from one source (direct Gemma or distilled Codex), not a consensus.

The models applied no category: nothing in the taxonomy fit this work.
Study designSimulation or modeling
Domainnot available
GenreEmpirical

How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".

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Citations3
Published2020
Admission routes1
Has abstractyes

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