Dimensionless Analysis of Micro Pirani Gauges for Broad Pressure Sensing Range
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Bibliographic record
Abstract
This article proposes a dimensionless thermal analysis of micro-fabricated membranes as Pirani gauges for pressure measurements. Use of dimensionless numbers simplifies the mode l and facilitates understanding. Our model's predictions are consistent with experimental results obtained from heated suspended SiO2/SiN membranes with a sub-micrometer separation distance with the substrate (500 nm). Other systems reported in the literature also confirmed the modelling. This framework is a powerful prediction tool as it allows a study of the effects of key parameters on the sensing pressure range, including geometry, material properties and radiative heat fluxes. It also addresses the effect of the operating mode, either constant temperature or constant power. Furthermore, we propose a methodology for rapid design of Pirani gauge arrays to reach a broad range of pressure measurements from atmospheric pressure to high vacuum (10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-3</sup> Pa) without microcontroller use. We prove that this new formalism offers a way to optimize the geometry to reach the target application, which essentially depends on the power consumption, material choice and the pressure measurement range.
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Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from it