Low-Friction, High-Speed Rotary 3-Phase Micromotor Using the PolyMUMPS Process
Bibliographic record
Abstract
We present the design and fabrication of an electrostatic side-drive micromotor that achieves the fastest operating speed reported for a device fabricated using the PolyMUMPS process. High-speed is obtained by optimizing the geometric parameters of the rotor and the stator electrodes, employing techniques to reduce friction in various regions of the micromotor and adopting multiple approaches to enhance the driving torque of the micromotor. The key geometrical parameters of the micromotor are determined through analytical modelling, bypassing intensive computational methods. The rotor diameter of the micromotor is 600 μm and has only 12 circular bearing supports each having radius of 3 μm. The rotary micromotor exhibits a speed of up to 7,875 rpm.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.001 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".