Fabrication of micromachined hotplates by combining the PolyMUMPs technology with self-aligned post-processing steps
Bibliographic record
Abstract
Abstract In this article, we propose a process to fabricate micromachined hotplates, by leveraging the multiuser MEMS process known as PolyMUMPs from MEMSCAP. The PolyMUMPs technology is complemented through self-aligned post-processing steps. This procedure eliminates the requirement of aligning masks during post-processing and enables easy prototyping of microhotplates. Two designs were fabricated, including microhotplates with gold interdigitated-electrodes and temperature sensors. The final device features a suspended membrane with dimensions of 400 × 120 μ m 2 and can achieve a heating temperature of 300 °C while consuming 24.1 mW of power. Long-term heating tests showed that the device can withstand a continuous heating process for more than 150 h at a temperature of 400 °C. These properties make the device suitable for targeting a wide range of applications, including the heating platform of metal-oxide type gas sensors.
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How this classification was reachedexpand
Full frame distilled prediction
Teacher imitationNot calibrated prevalence, not ground truth. Human validation pending. Learned from the 10,348 direct Codex labels and 10,348 direct Gemma labels. Candidate is the union of thresholded teacher heads; consensus is their intersection. These outputs are machine_predicted_unvalidated and are not human labels or direct frontier model labels.
Codex and Gemma teacher scores by category
| Category | Codex | Gemma |
|---|---|---|
| Metaresearch | 0.000 | 0.000 |
| Meta-epidemiology (narrow) | 0.000 | 0.000 |
| Meta-epidemiology (broad) | 0.000 | 0.000 |
| Bibliometrics | 0.000 | 0.000 |
| Science and technology studies | 0.000 | 0.000 |
| Scholarly communication | 0.000 | 0.000 |
| Open science | 0.000 | 0.000 |
| Research integrity | 0.000 | 0.000 |
| Insufficient payload (model declined to judge) | 0.000 | 0.000 |
Machine scores (provisional)
The two teacher heads of the student model, read on this work. A score orders the frame for review; it never asserts a category, and the validation status ships verbatim with every row.
Baseline scores from an immature model (maturity gate not passed, 7 training rounds). Scores rank; they never assert a category.
score_only:v0-immature-baseline · verbatim from the scoring run: score_only means the number may rank works, and no category label ships from itClassification
machine, unvalidatedMachine predicted; a candidate call from one teacher head, not a consensus.
How this classification was reached, model by model and score by score, is at the end of the page under "How this classification was reached".